US 12,125,690 B2
Target, film forming apparatus, and method of manufacturing film formation object
Hironori Torii, Tokyo (JP); and Kouji Kageyama, Tokyo (JP)
Assigned to JSW AFTY CORPORATION, Tokyo (JP)
Appl. No. 17/426,881
Filed by JSW AFTY Corporation, Tokyo (JP)
PCT Filed Dec. 25, 2019, PCT No. PCT/JP2019/050892
§ 371(c)(1), (2) Date Jul. 29, 2021,
PCT Pub. No. WO2020/158272, PCT Pub. Date Aug. 6, 2020.
Claims priority of application No. 2019-013750 (JP), filed on Jan. 30, 2019.
Prior Publication US 2022/0102124 A1, Mar. 31, 2022
Int. Cl. H01J 37/34 (2006.01); C23C 14/34 (2006.01)
CPC H01J 37/3435 (2013.01) [C23C 14/3407 (2013.01); H01J 37/3423 (2013.01)] 3 Claims
OG exemplary drawing
 
1. A target comprising:
a target member having a cylindrical shape; and
a support member configured to support the target member,
wherein the support member has a wall portion in contact with the target member via an adhesive member,
wherein the wall portion includes:
a first portion formed to have a first thickness;
a second portion formed to have a second thickness thicker than the first thickness; and
a third portion formed to have the first thickness,
wherein the second portion is sandwiched between the first portion and the third portion,
wherein the first portion and the third portion are symmetrically arranged with respect to a virtual plane which is orthogonal to a center line of the cylindrical shape and divides the target member into equal halves, and
wherein the second portion includes a concave portion which is thicker than the first portion and is thinner than the second thickness.