US 12,124,786 B2
Modeling method
Shimpei Miura, Mie Mie (JP); Hiroshi Tsukada, Yokkaichi Mie (JP); Kiminori Yoshino, Kuwana Mie (JP); and Hiroyuki Tanizaki, Nagoya Aichi (JP)
Assigned to KIOXIA CORPORATION, Tokyo (JP)
Filed by Kioxia Corporation, Tokyo (JP)
Filed on Aug. 16, 2021, as Appl. No. 17/403,556.
Claims priority of application No. 2021-045246 (JP), filed on Mar. 18, 2021.
Prior Publication US 2022/0302102 A1, Sep. 22, 2022
Int. Cl. G06F 30/398 (2020.01); H01L 27/02 (2006.01); G06F 111/10 (2020.01)
CPC G06F 30/398 (2020.01) [H01L 27/0207 (2013.01); G06F 2111/10 (2020.01)] 10 Claims
OG exemplary drawing
 
1. A modeling method comprising:
dividing a shape measurement target with reference to a material interface and setting an approximate region;
setting one or more division patterns in which positions of division planes for defining the approximate region are different from each other;
providing a predetermined tolerance to a measurement value of the shape measurement target;
shape-approximating the shape measurement target so as to converge within the predetermined tolerance by a mathematically-expressed shape model;
selecting a pattern capable of being expressed by a minimum dimension number from among all approximated division patterns; and
expressing a shape of the shape measurement target by a mathematical expression in which the dimension number is minimized.