US 12,124,503 B2
Similar-defect search/display system, apparatus and method
Takahiro Takimoto, Yokohama (JP); Kouta Nakata, Tokyo (JP); Kazunori Imoto, Kawasaki (JP); Ayana Yamamoto, Tokyo (JP); and Shun Hirao, Kawasaki (JP)
Assigned to KABUSHIKI KAISHA TOSHIBA, Tokyo (JP)
Filed by KABUSHIKI KAISHA TOSHIBA, Tokyo (JP)
Filed on Feb. 26, 2021, as Appl. No. 17/186,045.
Claims priority of application No. 2020-154108 (JP), filed on Sep. 14, 2020.
Prior Publication US 2022/0083590 A1, Mar. 17, 2022
Int. Cl. G06F 16/53 (2019.01); G06F 16/55 (2019.01); G06F 16/58 (2019.01); G06F 16/583 (2019.01); G06T 7/00 (2017.01)
CPC G06F 16/5854 (2019.01) [G06F 16/53 (2019.01); G06F 16/55 (2019.01); G06F 16/5866 (2019.01); G06T 7/001 (2013.01); G06T 2207/30148 (2013.01)] 10 Claims
OG exemplary drawing
 
1. A similar-defect search/display system comprising:
processing circuitry configured to
determine a feature quantity of process-targeted manufacturing data;
store, in a first memory, cause-unidentified data including manufacturing data in which a cause of a defect is not identified and a feature quantity of the manufacturing data;
store, in a second-memory, cause-identified data including manufacturing data in which a cause of a defect has been identified, a feature quantity of the manufacturing data, and defect cause information;
search, based on the feature quantity of the process-targeted manufacturing data, the first memory and the second memory for the cause-unidentified data and the cause-identified data, respectively, that have a feature quantity similar to the feature quantity of the process-targeted manufacturing data; and
display, on a display device, a search result of the cause-unidentified data and a search result of the cause-identified data,
wherein the processing circuitry is configured to:
identify a tendency of occurrence of a defect relating to the process-targeted manufacturing data in accordance with a first number of items of the cause-unidentified data found in the first memory and a second number of items of the cause-identified data found in the second memory, and
further display, on the display device, the tendency of occurrence.