US 12,124,119 B2
Optical modulator and package
Lan-Chou Cho, Hsinchu (TW); Chewn-Pu Jou, Hsinchu (TW); Feng-Wei Kuo, Hsinchu County (TW); Huan-Neng Chen, Taichung (TW); and Min-Hsiang Hsu, Hsinchu (TW)
Assigned to Taiwan Semiconductor Manufacturing Company, Ltd., Hsinchu (TW)
Filed by Taiwan Semiconductor Manufacturing Company, Ltd., Hsinchu (TW)
Filed on Feb. 8, 2023, as Appl. No. 18/166,472.
Application 18/166,472 is a continuation of application No. 17/577,412, filed on Jan. 18, 2022.
Application 17/577,412 is a continuation of application No. 17/094,816, filed on Nov. 11, 2020, granted, now 11,269,202, issued on Mar. 8, 2022.
Application 17/094,816 is a continuation of application No. 16/514,993, filed on Jul. 17, 2019, granted, now 10,866,440, issued on Dec. 15, 2020.
Prior Publication US 2023/0194908 A1, Jun. 22, 2023
Int. Cl. G02F 1/025 (2006.01); G02F 1/015 (2006.01)
CPC G02F 1/025 (2013.01) [G02F 1/0151 (2021.01); G02F 2201/302 (2013.01)] 20 Claims
OG exemplary drawing
 
1. An optical modulator, comprising:
a carrier;
a waveguide disposed on the carrier, wherein the waveguide comprises:
a first optical coupling region doped with first dopants;
a second optical coupling region abutting the first optical coupling region and doped with second dopants, wherein the first dopants and the second dopants are of different conductivity types;
a first plurality of regions doped with the first dopants and arranged adjacent to the first optical coupling region, wherein the first plurality of regions have respective increasing doping concentrations as distances of the first plurality of regions increase from the first optical coupling region, the first plurality of regions have respective increasing heights as the distances of the first plurality of regions increase from the first optical coupling region, and a minimum doping concentration of the first plurality of regions is larger than a doping concentration of the first optical coupling region;
a first electrical coupling region connected to the first plurality of regions, wherein the first electrical coupling region is doped with the first dopants; and
a second plurality of regions doped with the second dopants and arranged adjacent to the second optical coupling region, wherein the second plurality of regions have respective increasing doping concentrations as distances of the second plurality of regions increase from the second optical coupling region.