CPC G01S 7/4814 (2013.01) [G01J 1/44 (2013.01); G01S 7/4816 (2013.01); G01S 17/10 (2013.01); G02B 27/30 (2013.01); H01S 5/02253 (2021.01); H01S 5/423 (2013.01); G01J 2001/4466 (2013.01); G01J 2001/448 (2013.01)] | 20 Claims |
1. A method, comprising:
aligning, with a transfer printing technique, an array of singulated vertical-cavity surface-emitting laser dies each configured to output light;
coupling an optical arrangement to the plurality of singulated vertical-cavity surface-emitting laser dies, the optical arrangement configured to receive light from the vertical-cavity surface-emitting lasers and to output a plurality of output light beams, the optical arrangement including one or more collimators configured to provide one or more collimated beams by collimating the light from the plurality of the vertical-cavity surface-emitting lasers and sub-optics configured to produce the plurality of output light beams by beam shaping the one or more collimated beams; and
integrating a plurality of micro-lenses into the array of singulated vertical-cavity surface-emitting laser dies and the optical arrangement.
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