US 12,123,846 B2
Wafer-level packaging of solid-state biosensor, microfluidics, and through-silicon via
Allen Timothy Chang, Hsinchu (TW); Jui-Cheng Huang, Hsinchu (TW); Wen-Chuan Tai, Hsinchu (TW); and Yu-Jie Huang, Kaohsiung (TW)
Assigned to TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD., Hsinchu (TW)
Filed by Taiwan Semiconductor Manufacturing Company, Ltd., Hsinchu (TW)
Filed on Aug. 17, 2023, as Appl. No. 18/451,427.
Application 18/451,427 is a division of application No. 17/095,151, filed on Nov. 11, 2020, granted, now 11,747,298.
Claims priority of provisional application 62/967,890, filed on Jan. 30, 2020.
Prior Publication US 2023/0393091 A1, Dec. 7, 2023
Int. Cl. G01N 27/414 (2006.01); H01L 23/48 (2006.01); H01L 23/522 (2006.01)
CPC G01N 27/4145 (2013.01) [H01L 23/481 (2013.01); H01L 23/5226 (2013.01)] 20 Claims
OG exemplary drawing
 
1. A method of fabricating a biosensor system package comprising:
providing a substrate, the substrate including a semiconductor layer having a front side and a back side, a buried oxide (BOX) layer at the back side, and a bulk silicon layer at the back side;
forming a transistor structure on the substrate, wherein a channel region of the transistor structure is in the semiconductor layer;
forming a multi-layer interconnect (MLI) structure on the front side of the semiconductor layer, wherein the MLI structure is electrically connected to the transistor structure;
attaching a carrier substrate to the MLI structure;
removing the bulk silicon layer;
etching the BOX layer to form an opening at the back side over the channel region;
depositing an interface layer on the back side over the channel region;
fabricating a microfluidic channel cap structure;
bonding the microfluidic channel cap structure to the BOX layer;
thinning the carrier substrate;
creating a first through substrate via (TSV) structure extending through the carrier substrate, the first TSV structure electrically connected to the MLI structure; and
thinning the microfluidic channel cap structure to form at least one port for inflow and outflow of fluid samples.