US 12,123,769 B2
Emitter structures for ultra-small vertical cavity surface emitting lasers (VCSELs) and arrays incorporating the same
Scott Burroughs, Raleigh, NC (US); Brent Fisher, Bethesda, MD (US); and James Carter, Chapel Hill, NC (US)
Assigned to Sense Photonics, Inc., Durham, NC (US)
Filed by Sense Photonics, Inc., Durham, NC (US)
Filed on Aug. 26, 2021, as Appl. No. 17/412,739.
Application 17/412,739 is a continuation of application No. 16/693,666, filed on Nov. 25, 2019, granted, now 11,125,862.
Application 16/693,666 is a continuation of application No. 15/951,727, filed on Apr. 12, 2018, granted, now 10,530,130, issued on Jan. 7, 2020.
Claims priority of provisional application 62/613,985, filed on Jan. 5, 2018.
Claims priority of provisional application 62/484,701, filed on Apr. 12, 2017.
Prior Publication US 2021/0396851 A1, Dec. 23, 2021
Int. Cl. G01J 1/44 (2006.01); F21V 5/04 (2006.01); G01S 7/481 (2006.01); G01S 17/02 (2020.01); G01S 17/89 (2020.01); G01S 17/894 (2020.01); G02B 5/08 (2006.01); G02B 26/10 (2006.01); H01L 25/00 (2006.01); H01L 31/167 (2006.01); H01L 31/18 (2006.01); H01S 3/02 (2006.01); H01S 5/00 (2006.01); H01S 5/02253 (2021.01); H01S 5/02375 (2021.01); H01S 5/026 (2006.01); H01S 5/042 (2006.01); H01S 5/062 (2006.01); H01S 5/12 (2021.01); H01S 5/183 (2006.01); H01S 5/30 (2006.01); H01S 5/40 (2006.01); H01S 5/42 (2006.01); G02B 3/00 (2006.01); H01S 5/02 (2006.01); H01S 5/02255 (2021.01)
CPC G01J 1/44 (2013.01) [F21V 5/041 (2013.01); F21V 5/045 (2013.01); G01S 7/4815 (2013.01); G01S 17/02 (2013.01); G01S 17/89 (2013.01); G01S 17/894 (2020.01); G02B 5/0883 (2013.01); G02B 26/10 (2013.01); H01L 25/50 (2013.01); H01L 31/167 (2013.01); H01L 31/18 (2013.01); H01S 3/025 (2013.01); H01S 5/0028 (2013.01); H01S 5/0071 (2013.01); H01S 5/02253 (2021.01); H01S 5/02375 (2021.01); H01S 5/026 (2013.01); H01S 5/0262 (2013.01); H01S 5/04254 (2019.08); H01S 5/062 (2013.01); H01S 5/12 (2013.01); H01S 5/183 (2013.01); H01S 5/18394 (2013.01); H01S 5/18397 (2013.01); H01S 5/30 (2013.01); H01S 5/40 (2013.01); H01S 5/4025 (2013.01); H01S 5/4037 (2013.01); H01S 5/4075 (2013.01); H01S 5/423 (2013.01); G01J 2001/448 (2013.01); G02B 3/0006 (2013.01); H01S 5/0216 (2013.01); H01S 5/0217 (2013.01); H01S 5/02255 (2021.01); H01S 5/04257 (2019.08)] 20 Claims
OG exemplary drawing
 
1. A Light Detection and Ranging (LIDAR) array, comprising:
a plurality of laser diodes arranged on a substrate, wherein each of the laser diodes comprises:
a semiconductor structure comprising a lower Bragg reflector layer, an active region, and an upper Bragg reflector layer, the upper Bragg reflector layer comprising a lasing aperture having an optical axis oriented perpendicular to a surface of the active region,
wherein the active region comprises a first material that is configured to emit light in a wavelength range of about 1300 nanometers to about 2000 nanometers, wherein at least one of the lower or the upper Bragg reflector layers comprises a second material, and wherein respective lattice structures of the first and second materials are independent of one another.