US 12,123,420 B2
Vacuum pump and stator column
Takashi Kabasawa, Chiba (JP); Yasushi Tateno, Chiba (JP); and Yohei Ogawa, Chiba (JP)
Assigned to Edwards Japan Limited, Chiba (JP)
Appl. No. 17/793,128
Filed by Edwards Japan Limited, Chiba (JP)
PCT Filed Jan. 20, 2021, PCT No. PCT/JP2021/001916
§ 371(c)(1), (2) Date Jul. 15, 2022,
PCT Pub. No. WO2021/149742, PCT Pub. Date Jul. 29, 2021.
Claims priority of application No. 2020-010263 (JP), filed on Jan. 24, 2020.
Prior Publication US 2023/0049439 A1, Feb. 16, 2023
Int. Cl. F04D 19/04 (2006.01); F04D 27/00 (2006.01); F04D 29/08 (2006.01)
CPC F04D 19/042 (2013.01) [F04D 27/001 (2013.01); F04D 29/083 (2013.01); F05D 2210/12 (2013.01)] 7 Claims
OG exemplary drawing
 
1. A vacuum pump comprising:
a housing in which an outlet port for exhausting a gas is formed;
a stator column enclosed in the housing and surrounding various electric components;
inside the housing, a rotating shaft rotatably supported;
a rotating body fixed to the rotating shaft, disposed outside the stator column and rotating with the rotating shaft;
a stator portion disposed opposite to the rotating body with a predetermined gap; and
an exhaust mechanism for exhausting the gas by mutual actions of the rotating body which is rotated and the stator portion, wherein
a first annular gas channel allowing the outlet port and an exit of the exhaust mechanism to communicate with each other is provided;
a second annular gas channel formed by two partition walls formed from an outer peripheral surface of the stator column toward the rotating body is provided, and
a sectional area of the second annular gas channel is formed larger in the vicinity of the outlet port and smaller on an opposite side.