US 12,123,409 B2
Actuator, fluid control device, and actuator manufacturing method
Nobuhira Tanaka, Kyoto (JP)
Assigned to MURATA MANUFACTURING CO., LTD., Kyoto (JP)
Filed by Murata Manufacturing Co., Ltd., Kyoto (JP)
Filed on Sep. 8, 2022, as Appl. No. 17/930,440.
Application 17/930,440 is a continuation of application No. PCT/JP2021/000675, filed on Jan. 12, 2021.
Claims priority of application No. 2020-047131 (JP), filed on Mar. 18, 2020.
Prior Publication US 2023/0006126 A1, Jan. 5, 2023
Int. Cl. F04B 43/04 (2006.01); H10N 30/20 (2023.01); H10N 30/50 (2023.01)
CPC F04B 43/046 (2013.01) [H10N 30/20 (2023.02); H10N 30/506 (2023.02)] 20 Claims
OG exemplary drawing
 
1. An actuator comprising:
a first member composed of a conductive plate having a first main surface and a second main surface, the first member including a first flat plate, a frame body surrounding the first flat plate, and a coupling member, the coupling member being connected with an outer edge of the first flat plate and the frame body and coupling the first flat plate to the frame body;
a piezoelectric element having a third main surface and a fourth main surface and arranged on the first flat plate, the third main surface facing the first main surface of the first flat plate;
a first power supply member arranged on a first main surface side of the first member and connected with the frame body of the first member;
a second power supply member arranged on a same side as the first power supply member on the first member and having a portion connected with the fourth main surface and a portion overlapped with the frame body; and
an insulating layer arranged between the second power supply member and the frame body in a portion where the second power supply member and the frame body are overlapped, wherein
when a direction in which the first power supply member and the second power supply member are aligned with respect to the piezoelectric element is defined as a thickness direction,
the first power supply member includes a first external connection terminal protruding in a direction orthogonal to the thickness direction,
the second power supply member includes a second external connection terminal protruding in the direction orthogonal to the thickness direction,
the first and second external connection terminals are arranged on a common plane that is perpendicular to the thickness direction, and
the first power supply member has a bent portion, wherein the bent portion is bent toward the frame body to be electrically connected to the frame body, the bent portion being located on a side of the first power supply member that is opposite to a side on which the first external connection terminal protrudes.