	US 12,122,685 B1
	Method for preparing MoF₆based on plasma activation of SF₆
Xiaoxing Zhang, Wuhan (CN); Yalong Li, Wuhan (CN); Zhaodi Yang, Wuhan (CN); Kun Wan, Wuhan (CN); Shuangshuang Tian, Wuhan (CN); Guozhi Zhang, Wuhan (CN); Yin Zhang, Wuhan (CN); Yunjian Wu, Wuhan (CN); Guoguang Zhang, Wuhan (CN); and Guangke Li, Handan (CN)
Assigned to Hubei University of Technology, Wuhan (CN); and Handan Puxin Electric Power Technology Co., Ltd., Handan (CN)
Filed by Hubei University of Technology, Wuhan (CN); and Handan Puxin Electric Power Technology Co., Ltd., Handan (CN)
Filed on May 6, 2024, as Appl. No. 18/656,350.
Claims priority of application No. 202310643329.9 (CN), filed on Jun. 1, 2023.
Int. Cl. C01G 39/04 (2006.01)

CPC C01G 39/04 (2013.01)

9 Claims

1. A method for preparing molybdenum hexafluoride (MoF₆), comprising the following steps:

S1, filling a discharge area of a plasma reactor with molybdenum powder, and filling the discharge area of the plasma reactor with a catalyst that catalyzes activation and ionization of sulfur hexafluoride (SF₆), wherein the catalyst is selected from at least one of aluminium oxide (Al₂O₃) and silicon dioxide (SiO₂);

S2, introducing an inert gas and an SF₆gas into the discharge area of the plasma reactor, wherein the inert gas is ionized into plasma, and the SF₆gas is ionized into fluorine atoms and low-fluorine sulfides after being activated by the plasma; and

S3, generating an MoF₆gas and sulfur elements through reaction of the fluorine atoms and the low-fluorine sulfides with the molybdenum powder.