US 12,122,665 B2
Micro-electromechanical system device using a metallic movable part and methods for forming the same
Tao-Cheng Liu, Hsinchu (TW); Chen-Hsuan Yen, Taichung (TW); and Ying-Hsun Chen, Taoyuan (TW)
Assigned to Taiwan Semiconductor Manufacturing Company Limited, Hsinchu (TW)
Filed by Taiwan Semiconductor Manufacturing Company Limited, Hsinchu (TW)
Filed on Aug. 27, 2021, as Appl. No. 17/459,253.
Prior Publication US 2023/0066841 A1, Mar. 2, 2023
Int. Cl. B81B 3/00 (2006.01); B81C 1/00 (2006.01); G01P 1/00 (2006.01); G01P 15/08 (2006.01)
CPC B81B 3/007 (2013.01) [B81C 1/00658 (2013.01); G01P 1/00 (2013.01); G01P 15/08 (2013.01); B81B 2201/0235 (2013.01); B81B 2203/0136 (2013.01); B81B 2203/04 (2013.01); B81C 2201/0133 (2013.01); B81C 2201/0181 (2013.01)] 20 Claims
OG exemplary drawing
 
1. A micro-electromechanical system (MEMS) device, comprising:
a movable comb structure located in a cavity within an enclosure and comprising:
a comb shaft portion; and
movable comb fingers laterally protruding from the comb shaft portion, wherein the movable comb structure comprises a metallic material portion and a semiconductor material portion in direct contact with the metallic material portion; and
a stationary structure affixed to the enclosure, wherein the movable comb structure and the stationary structure are configured to generate an electrical output signal based on lateral movement of the movable comb structure relative to the stationary structure.