US 12,122,664 B2
Microfluidic device and preparation method therefor, and microfluidic system
Xue Feng, Zhejiang (CN); Baicheng Zhang, Zhejiang (CN); Ying Chen, Zhejiang (CN); Haoran Fu, Zhejiang (CN); Ye Jiang, Zhejiang (CN); and Lanlan Liu, Zhejiang (CN)
Assigned to INSTITUTE OF FLEXIBLE ELECTRONICS TECHNOLOGY OF THU, ZHEJIANG, Jiaxing (CN); and TSINGHUA UNIVERSITY, Beijing (CN)
Appl. No. 17/043,633
Filed by INSTITUTE OF FLEXIBLE ELECTRONICS TECHNOLOGY OF THU, ZHEJIANG, Zhejiang (CN); and Tsinghua University, Beijing (CN)
PCT Filed Dec. 7, 2018, PCT No. PCT/CN2018/119644
§ 371(c)(1), (2) Date Sep. 29, 2020,
PCT Pub. No. WO2020/010788, PCT Pub. Date Jan. 6, 2020.
Claims priority of application No. 201810771605.9 (CN), filed on Jul. 13, 2018.
Prior Publication US 2021/0053815 A1, Feb. 25, 2021
Int. Cl. B81B 1/00 (2006.01); B81C 1/00 (2006.01)
CPC B81B 1/006 (2013.01) [B81C 1/00103 (2013.01)] 19 Claims
OG exemplary drawing
 
1. A method for preparing a microfluidic device, comprising:
providing a mold having a microgroove;
injecting a liquid metal into the microgroove of the mold, and solidifying the liquid metal to obtain a solid metal;
separating the solid metal from the mold;
attaching an electrode to the solid metal;
providing a cladding layer on a surface of the solid metal provided with the electrode, such that the solid metal is wrapped by the cladding layer, and at least a part of the electrode extends outside the cladding layer, so as to obtain a preform; and
fixing the preform in a substrate, melting the solid metal and extending at least a part of the electrode outside the substrate, to obtain the microfluidic device.