US 12,122,577 B2
Substrate storage container
Akihiro Hasegawa, Niigata (JP); Masaru Hagano, Saitama (JP); and Sayo Tajika, Niigata (JP)
Assigned to Shin-Etsu Polymer Co., Ltd., Tokyo (JP)
Filed by Shin-Etsu Polymer Co., Ltd., Tokyo (JP)
Filed on Feb. 13, 2023, as Appl. No. 18/168,541.
Application 18/168,541 is a continuation of application No. PCT/JP2021/027048, filed on Jul. 19, 2021.
Claims priority of application No. 2020-187505 (JP), filed on Nov. 10, 2020.
Prior Publication US 2023/0182977 A1, Jun. 15, 2023
Int. Cl. B65D 53/02 (2006.01); B65D 43/02 (2006.01)
CPC B65D 53/02 (2013.01) [B65D 43/022 (2013.01); B65D 2543/00564 (2013.01); B65D 2543/00972 (2013.01)] 4 Claims
OG exemplary drawing
 
1. A substrate storage container, comprising:
a container body configured to store a substrate;
a lid that closes a rectangular opening of the container body; and
an annular gasket located between the container body and the lid, wherein
the container body has at least either one of a guide rib or a guide slit in an opening portion around the opening,
the lid has at least either one of a guide slit or a guide rib that is engageable with the guide rib or the guide slit of the container body, and
the guide rib and the guide slit are configured to restrict tilting of the lid with respect to an opening surface where the opening is formed when the opening is closed with the lid, wherein the guide rib is prevented from engaging the guide slit when the lid is tilted at a predetermined tilt angle or more with respect to the opening surface and is allowed to engage the guide slit when the lid is tilted less than the predetermined tilt angle.