US 12,121,991 B2
Processing apparatus, and manufacturing method of movable body
Masayuki Shiraishi, Kumagaya (JP); Shigeki Egami, Tokyo (JP); Yoshio Kawabe, Kumagaya (JP); Yosuke Tatsuzaki, Kumagaya (JP); and Yuichi Shibazaki, Kumagaya (JP)
Assigned to NIKON CORPORATION, Tokyo (JP)
Appl. No. 16/756,604
Filed by NIKON CORPORATION, Tokyo (JP)
PCT Filed Oct. 25, 2017, PCT No. PCT/JP2017/038563
§ 371(c)(1), (2) Date Jul. 1, 2020,
PCT Pub. No. WO2019/082313, PCT Pub. Date May 2, 2019.
Prior Publication US 2020/0353560 A1, Nov. 12, 2020
Int. Cl. B23K 26/04 (2014.01)
CPC B23K 26/04 (2013.01) 78 Claims
OG exemplary drawing
 
1. A processing apparatus comprising:
a light irradiation apparatus that irradiates a surface of an object with a processing light to thereby change a shape of the surface of the object; and
a control apparatus that sets an irradiation position of the processing light and sets, as a non-processing area at which an irradiation of the processing light is prohibited, an area at which an operational structural object exists on the surface of the object by using an information relating to a shape of the surface of the object so as to form a riblet structure by which a frictional resistance of the surface of the object to a fluid is reduced, wherein
the control apparatus sets, as the irradiation position, a position in a plane intersecting with an irradiation direction of the processing light, and
the control apparatus controls the light irradiation apparatus so that the set irradiation position is irradiated with the processing light.