US 12,121,926 B2
Fluid supply system
Ryohei Takasawa, Osaka (JP); Naoto Tagashira, Osaka (JP); Teruyuki Funabiki, Osaka (JP); and Masanori Uebayashi, Osaka (JP)
Assigned to FUJIKIN INCORPORATED, Osaka (JP)
Appl. No. 17/638,376
Filed by FUJIKIN INCORPORATED, Osaka (JP)
PCT Filed Jun. 24, 2020, PCT No. PCT/JP2020/024738
§ 371(c)(1), (2) Date Feb. 25, 2022,
PCT Pub. No. WO2021/039073, PCT Pub. Date Mar. 4, 2021.
Claims priority of application No. 2019-156355 (JP), filed on Aug. 29, 2019.
Prior Publication US 2022/0323979 A1, Oct. 13, 2022
Int. Cl. B05C 11/10 (2006.01); B05C 9/02 (2006.01)
CPC B05C 11/10 (2013.01) [B05C 9/02 (2013.01); Y10T 137/6966 (2015.04); Y10T 137/7032 (2015.04)] 7 Claims
OG exemplary drawing
 
1. A fluid supply system comprising:
a support body having: a first plate; a second plate provided on one side of the first plate in a longitudinal direction so as to be orthogonal to the first plate; and a third plate provided on one end of the first plate in a height direction so as to be orthogonal to the first plate and the second plate;
a first-gas supply unit provided on the third plate, the first-gas supply unit being configured to vaporize liquid and being configured to supply a first gas generated by the vaporization of the liquid to a supply target;
a liquid supply unit provided on either one of the first plate and the second plate, the liquid supply unit being configured to supply fluid containing the liquid to the first-gas supply unit;
a second-gas supply unit provided on other of the first plate and the second plate, a second-gas supply unit being configured to supply a second gas to the first-gas supply unit;
a first communication mechanism configured to enable communication between the first-gas supply unit and the liquid supply unit; and
a second communication mechanism configured to enable communication between the first-gas supply unit and the second-gas supply unit.