US 11,799,448 B2
Digitally tunable acoustic wave resonators
Roozbeh Tabrizian, Gainesville, FL (US)
Assigned to University of Florida Research Foundation, Incorporated, Gainesville, FL (US)
Filed by University of Florida Research Foundation, Incorporated, Gainesville, FL (US)
Filed on Feb. 11, 2021, as Appl. No. 17/173,919.
Claims priority of provisional application 62/976,372, filed on Feb. 14, 2020.
Prior Publication US 2021/0257987 A1, Aug. 19, 2021
Int. Cl. H03H 9/17 (2006.01); H03H 3/02 (2006.01); H03H 9/02 (2006.01); H03H 9/13 (2006.01)
CPC H03H 9/176 (2013.01) [H03H 3/02 (2013.01); H03H 9/02031 (2013.01); H03H 9/13 (2013.01); H03H 9/175 (2013.01); H03H 2003/025 (2013.01); H03H 2009/02196 (2013.01)] 20 Claims
OG exemplary drawing
 
1. A digitally tunable acoustic wave resonator comprising:
a first electrode positioned above a substrate;
a composite stack positioned above the first electrode, the composite stack comprising a plurality of alternate layers of a ferroelectric layer and a transition-metal nitride layer; and
a second electrode positioned above the composite stack,
wherein the ferroelectric layer comprises an aluminum scandium nitride layer (Al1-xScxN), and wherein 0<x<1.