CPC H03H 9/176 (2013.01) [H03H 3/02 (2013.01); H03H 9/02031 (2013.01); H03H 9/13 (2013.01); H03H 9/175 (2013.01); H03H 2003/025 (2013.01); H03H 2009/02196 (2013.01)] | 20 Claims |
1. A digitally tunable acoustic wave resonator comprising:
a first electrode positioned above a substrate;
a composite stack positioned above the first electrode, the composite stack comprising a plurality of alternate layers of a ferroelectric layer and a transition-metal nitride layer; and
a second electrode positioned above the composite stack,
wherein the ferroelectric layer comprises an aluminum scandium nitride layer (Al1-xScxN), and wherein 0<x<1.
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