US 11,798,833 B2
Methods of use of a servo control system
Paul Wirth, Kalispell, MT (US); and Behzad Taheri, Austin, TX (US)
Assigned to Applied Materials, Inc., Santa Clara, CA (US)
Filed by APPLIED MATERIALS, INC., Santa Clara, CA (US)
Filed on Feb. 26, 2020, as Appl. No. 16/801,622.
Prior Publication US 2021/0265194 A1, Aug. 26, 2021
Int. Cl. H01L 21/687 (2006.01); F15B 9/03 (2006.01); F15B 11/076 (2006.01); F15B 9/14 (2006.01)
CPC H01L 21/68742 (2013.01) [F15B 9/03 (2013.01); F15B 9/14 (2013.01); F15B 11/076 (2013.01)] 14 Claims
OG exemplary drawing
 
1. A method, comprising:
receiving by a controller a first pressure measurement from a first pressure sensor that measures pressure in a first chamber of a pneumatic actuator;
receiving by the controller a second pressure measurement from a second pressure sensor that measures pressure in a second chamber of the pneumatic actuator;
receiving by the controller a position measurement from a position sensor that measures a position of a moving member of the pneumatic actuator;
determining by the controller an output force based on a commanded force and an estimated force, wherein the commanded force is based at least in part on the position measurement, and wherein the estimated force is based on the first pressure measurement, the second pressure measurement, and the position measurement;
generating a control signal based on the output force;
transmitting the control signal to at least one proportional pneumatic valve of a servo-control system to control pressurized fluid to the pneumatic actuator; and
operating the servo-control system using the control signal.