US 11,798,819 B2
Liquid processing apparatus and liquid processing method
Kazuki Kosai, Koshi (JP); Yusuke Takamatsu, Koshi (JP); and Taisei Inoue, Koshi (JP)
Assigned to TOKYO ELECTRON LIMITED, Tokyo (JP)
Filed by Tokyo Electron Limited, Tokyo (JP)
Filed on Jun. 22, 2021, as Appl. No. 17/354,128.
Claims priority of application No. 2020-107773 (JP), filed on Jun. 23, 2020.
Prior Publication US 2021/0398828 A1, Dec. 23, 2021
Int. Cl. H01L 21/67 (2006.01); H01L 21/02 (2006.01); B08B 3/14 (2006.01); B08B 13/00 (2006.01); B08B 3/08 (2006.01)
CPC H01L 21/67051 (2013.01) [B08B 3/08 (2013.01); B08B 3/14 (2013.01); B08B 13/00 (2013.01); H01L 21/02057 (2013.01); B08B 2203/007 (2013.01)] 15 Claims
OG exemplary drawing
 
1. A liquid processing apparatus, comprising:
a storage tank which stores a processing liquid therein;
a circulation line through which the processing liquid sent from the storage tank is returned back into the storage tank;
a supply line which connects the circulation line and a supply configured to supply the processing liquid onto a substrate;
a return line which is connected to the supply line and through which the processing liquid is returned back into the storage tank from the supply line;
at least one filter provided on an upstream side of the supply line relative to a connection point between the return line and the supply line, and configured to remove a foreign substance in the processing liquid;
a first temperature sensor provided in the circulation line and configured to detect a first temperature of the processing liquid flowing in the circulation line;
a second temperature sensor provided in the return line and configured to detect a second temperature of the processing liquid flowing in the return line;
a switching valve configured to switch a flow of the processing liquid into the return line or into the supply line on a supply side of the connection point; and
a control device programmed to control the switching valve and introduce the processing liquid into a processing liquid supply based on a temperature difference between the first temperature and the second temperature.