| CPC H01J 37/32724 (2013.01) [C23C 16/46 (2013.01); H01J 2237/2007 (2013.01); H01J 2237/3321 (2013.01)] | 5 Claims |
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1. A ceramic heater comprising:
a ceramic plate;
a planar electrode that is embedded in the ceramic plate and that has a via through-hole that penetrates therethrough in a thickness direction;
a resistive heating element that is embedded in the ceramic plate;
a first via that is conductive and that extends from the resistive heating element toward the via through-hole;
a second via that is conductive and that extends from the via through-hole in a direction opposite a direction toward the resistive heating element;
a coupler that is conductive, that is spaced from an inner circumferential surface around the via through-hole inside the via through-hole, and that electrically couples the first via and the second via with each other;
a reinforcement portion that is disposed inside the via through-hole between the coupler and the inner circumferential surface around the via through-hole and that is composed of a material that is the same as a material of the ceramic plate;
wherein the planar electrode has a close contact through-hole that penetrates through the planar electrode in the thickness direction,
wherein the close contact through-hole is filled with the material that is the same as the material of the ceramic plate, and
wherein density of the via through-hole and the close contact through-hole increases as positions thereof are closer to an outer circumference of the ceramic plate.
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