CPC H01J 37/28 (2013.01) [H01J 37/147 (2013.01); H01J 37/20 (2013.01); H01J 37/22 (2013.01); H01J 2237/2803 (2013.01); H01J 2237/2806 (2013.01); H01J 2237/2817 (2013.01); H01J 2237/2826 (2013.01); H01J 2237/3045 (2013.01)] | 5 Claims |
1. A charged particle beam device, comprising:
a deflector configured to scan a sample with a charged particle beam emitted from a charged particle source; and
a control device configured to control the deflector;
wherein the control device controls the deflector to scan with the charged particle beam a measurement portion in a field of view designated in the sample, extracts the measurement portion based on a measurement target pattern extracted from design data of the sample, the measurement target pattern including a field of view position for each combination of a plurality of scan speed conditions and a plurality of irradiation point interval conditions, and evaluates a state of the measurement portion based on a signal obtained by scanning the sample with the charged particle beam.
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