US 11,798,780 B2
Charged particle beam device
Toshiyuki Yokosuka, Tokyo (JP); Chahn Lee, Tokyo (JP); Hideyuki Kazumi, Tokyo (JP); Hajime Kawano, Tokyo (JP); Shahedul Hoque, Tokyo (JP); Kumiko Shimizu, Tokyo (JP); and Hiroyuki Takahashi, Tokyo (JP)
Assigned to Hitachi High-Tech Corporation, Tokyo (JP)
Filed by Hitachi High-Tech Corporation, Tokyo (JP)
Filed on Dec. 28, 2021, as Appl. No. 17/563,186.
Application 17/563,186 is a continuation of application No. 16/900,176, filed on Jun. 12, 2020, granted, now 11,239,052.
Application 16/900,176 is a continuation of application No. 16/275,775, filed on Feb. 14, 2019, granted, now 10,720,306, issued on Jul. 21, 2020.
Application 16/275,775 is a continuation of application No. 15/618,203, filed on Jun. 9, 2017, granted, now 10,249,474, issued on Apr. 2, 2019.
Application 15/618,203 is a continuation of application No. 15/023,936, granted, now 9,697,987, issued on Jul. 4, 2017, previously published as PCT/JP2014/065407, filed on Jun. 11, 2014.
Claims priority of application No. 2013-199130 (JP), filed on Sep. 26, 2013.
Prior Publication US 2022/0122804 A1, Apr. 21, 2022
Int. Cl. H01J 37/28 (2006.01); H01J 37/147 (2006.01); H01J 37/20 (2006.01); H01J 37/22 (2006.01)
CPC H01J 37/28 (2013.01) [H01J 37/147 (2013.01); H01J 37/20 (2013.01); H01J 37/22 (2013.01); H01J 2237/2803 (2013.01); H01J 2237/2806 (2013.01); H01J 2237/2817 (2013.01); H01J 2237/2826 (2013.01); H01J 2237/3045 (2013.01)] 5 Claims
OG exemplary drawing
 
1. A charged particle beam device, comprising:
a deflector configured to scan a sample with a charged particle beam emitted from a charged particle source; and
a control device configured to control the deflector;
wherein the control device controls the deflector to scan with the charged particle beam a measurement portion in a field of view designated in the sample, extracts the measurement portion based on a measurement target pattern extracted from design data of the sample, the measurement target pattern including a field of view position for each combination of a plurality of scan speed conditions and a plurality of irradiation point interval conditions, and evaluates a state of the measurement portion based on a signal obtained by scanning the sample with the charged particle beam.