US 11,797,557 B2
Data management platform, intelligent defect analysis system, intelligent defect analysis method, computer-program product, and method for defect analysis
Fei Yuan, Beijing (CN); Hong Wang, Beijing (CN); Jianmin Wu, Beijing (CN); Guoliang Shen, Beijing (CN); Tian Lan, Beijing (CN); Yue Tang, Beijing (CN); Haohan Wu, Beijing (CN); Yingli Zeng, Beijing (CN); Jianzhou Wang, Beijing (CN); and Guanchun Bai, Beijing (CN)
Assigned to BOE Technology Group Co., Ltd., Beijing (CN)
Appl. No. 17/438,752
Filed by BOE Technology Group Co., Ltd., Beijing (CN)
PCT Filed Dec. 3, 2020, PCT No. PCT/CN2020/133681
§ 371(c)(1), (2) Date Sep. 13, 2021,
PCT Pub. No. WO2022/116107, PCT Pub. Date Jun. 9, 2022.
Prior Publication US 2022/0365945 A1, Nov. 17, 2022
Int. Cl. G06F 16/00 (2019.01); G06F 16/25 (2019.01); G06F 16/28 (2019.01); G06F 16/215 (2019.01); G06F 16/23 (2019.01); H04L 67/63 (2022.01); G06F 3/0482 (2013.01); G06F 7/08 (2006.01); H04L 67/1008 (2022.01); H04L 67/1097 (2022.01)
CPC G06F 16/254 (2019.01) [G06F 3/0482 (2013.01); G06F 7/08 (2013.01); G06F 16/215 (2019.01); G06F 16/2365 (2019.01); G06F 16/285 (2019.01); H04L 67/1008 (2013.01); H04L 67/1097 (2013.01); H04L 67/63 (2022.05)] 19 Claims
OG exemplary drawing
 
1. A method for defect analysis, comprising:
obtaining fabrication data information comprising defect information;
sorting the fabrication data information according to fabrication node groups into a plurality of groups of data, a respective one of the plurality of groups of data associated with a respective fabrication node group of the fabrication node groups;
calculating weights of evidence for the fabrication node groups to obtain a plurality of weights of evidence, wherein weights of evidence represent variability between a percentage of defects in the respective fabrication node group with respect to a percentage of defects in an entirety of the fabrication node groups;
wherein a respective weight of evidence for the respective fabrication node group 1s calculated according to Equation (1):

OG Complex Work Unit Math
wherein woei stands for the respective weight of evidence for the respective fabrication node group;
P(yi) stands for a ratio of a number of positive samples in the respective fabrication node group to a number of positive samples in all fabrication node groups;
P(ni) stands for a ratio of a number of negative samples in the respective fabrication node group to a number of negative samples in all fabrication node groups;
the positive samples means data comprising defect information associated with the respective fabrication node group;
the negative samples means data in which defect information associated with the respective fabrication node group is absent;
#yi stands for the number of positive samples in the respective fabrication node group;
#yr stands for the number of positive samples in all fabrication node groups;
#ni stands for the number of negative samples in the respective fabrication node group;
#yr stands for the number of negative samples in all fabrication node groups;
ranking the plurality of groups of data based on the plurality of weights of evidence; and
obtaining a list of plurality of groups of data ranked based on the plurality of weights of evidence.