US 11,796,920 B2
Method for controlling a manufacturing process and associated apparatuses
Jochem Sebastiaan Wildenberg, Aarle-Rixtel (NL); Hermanus Adrianus Dillen, Veldhoven (NL); Fan Feng, Eindhoven (NL); Ronald Van Ittersum, Tilburg (NL); Willem Louis Van Mierlo, Helmond (NL); and Koen Thuijs, Vught (NL)
Assigned to ASML NETHERLANDS B.V., Veldhoven (NL)
Appl. No. 17/797,506
Filed by ASML NETHERLANDS B.V., Veldhoven (NL)
PCT Filed Jan. 14, 2021, PCT No. PCT/EP2021/050615
§ 371(c)(1), (2) Date Aug. 4, 2022,
PCT Pub. No. WO2021/160365, PCT Pub. Date Aug. 19, 2021.
Claims priority of application No. 20156961 (EP), filed on Feb. 12, 2020; application No. 20158387 (EP), filed on Feb. 20, 2020; and application No. 20177353 (EP), filed on May 29, 2020.
Prior Publication US 2023/0082858 A1, Mar. 16, 2023
Int. Cl. G03F 7/20 (2006.01); G03F 7/00 (2006.01)
CPC G03F 7/70525 (2013.01) 20 Claims
OG exemplary drawing
 
1. A method for controlling a process of manufacturing devices on a substrate, the method comprising:
obtaining process data relating to the process;
determining a correction for the process based on the process data and a first control objective associated with the devices;
determining a first probability of the first control objective being achievable; and
adjusting, by a hardware computer, the correction based on the first probability and at least a second control objective having a second probability of being achievable compared to the first control objective.