CPC G03F 7/70525 (2013.01) | 20 Claims |
1. A method for controlling a process of manufacturing devices on a substrate, the method comprising:
obtaining process data relating to the process;
determining a correction for the process based on the process data and a first control objective associated with the devices;
determining a first probability of the first control objective being achievable; and
adjusting, by a hardware computer, the correction based on the first probability and at least a second control objective having a second probability of being achievable compared to the first control objective.
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