US 11,796,460 B2
Absorbance analysis apparatus for DCR gas, absorbance analysis method for DCR gas, and absorbance analysis program recording medium on which program for DCR gas is recorded
Yuichi Furuya, Yamanashi (JP); Masayuki Tanaka, Yamanashi (JP); Yuhei Sakaguchi, Kyoto (JP); Masakazu Minami, Kyoto (JP); and Toru Shimizu, Kyoto (JP)
Assigned to TOKYO ELECTRON LIMITED, Tokyo (JP); and HORIBA STEC, CO., LTD., Kyoto (JP)
Filed by Tokyo Electron Limited, Tokyo (JP); and HORIBA STEC, Co., Ltd., Kyoto (JP)
Filed on Mar. 15, 2022, as Appl. No. 17/695,167.
Claims priority of application No. 2021-049513 (JP), filed on Mar. 24, 2021.
Prior Publication US 2022/0307977 A1, Sep. 29, 2022
Int. Cl. G01N 21/3518 (2014.01)
CPC G01N 21/3518 (2013.01) 5 Claims
OG exemplary drawing
 
1. An absorbance analysis apparatus for DCR gas to measure volume of a DCR gas in a mixed gas consisting of a CO gas which is a carrier gas and the DCR (Ru3(CO)12) gas which is a component gas, wherein comprising
a DCR filter that is configured to transmit a light in a first wavenumber domain including an absorbance peak of the DCR gas,
a CO filter that is configured to transmit a light in a second wavenumber domain that is the absorbance wavenumber domain of the CO gas and that is different from the first wavenumber domain, and
a DCR gas volume calculator that is configured to calculate the volume of the DCR gas based on a first absorbance measured by the light transmitted through the DCR filter and a second absorbance measured by the light transmitted through the CO filter, wherein
the DCR gas volume calculator comprises
an interference affected estimation section that is configured to estimate an interference affected absorbance, which is the absorbance of the CO gas in the first wavenumber domain, based on the second absorbance,
an absorbance correction section that is configured to correct the first absorbance to the absorbance of the DCR gas by subtracting the interference affected absorbance from the first absorbance, and
a conversion section that is configured to convert the absorbance of the DCR gas into the volume of the DCR gas contained in the mixed gas based on the absorbance of the DCR gas corrected by the absorbance correction section.