CPC G01K 17/06 (2013.01) [G01K 1/026 (2013.01); G01K 15/007 (2013.01); G01R 31/2601 (2013.01); G01R 31/2635 (2013.01); G01R 31/2642 (2013.01); G01R 31/2831 (2013.01); G01R 31/2837 (2013.01); G01R 31/2849 (2013.01); G01R 31/2875 (2013.01); G01R 31/56 (2020.01)] | 18 Claims |
1. A lifetime estimation system for estimating a lifetime of a heating source in an apparatus for heating a target object using the heating source and performing a feedback control of a temperature of the target object using a temperature controller based on a temperature measurement value of the target object that is measured by a temperature measuring device, the temperature controller controlling a power supplied to the heating source and performing a temperature control using a state space model to perform the feedback control of the temperature of the target object,
the lifetime estimation system comprising:
a processor; and
a memory storing instructions thereon, the instructions when executed by the processor cause the processor to:
monitor the temperature measurement value of the target object that is measured by the temperature measuring device;
detect a hunting amount in a stable region of the monitored temperature of the target object; and
estimate the lifetime of the heating source from the detected hunting amount.
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