US 11,796,400 B2
Lifetime estimating system and method for heating source, and inspection apparatus
Masahito Kobayashi, Nirasaki (JP)
Assigned to Tokyo Electron Limited, Tokyo (JP)
Filed by TOKYO ELECTRON LIMITED, Tokyo (JP)
Filed on Feb. 10, 2021, as Appl. No. 17/172,686.
Claims priority of application No. 2020-021129 (JP), filed on Feb. 12, 2020.
Prior Publication US 2021/0247248 A1, Aug. 12, 2021
Int. Cl. G01K 17/06 (2006.01); G01R 31/26 (2020.01); G01R 31/28 (2006.01); G01K 1/02 (2021.01); G01K 15/00 (2006.01); G01R 31/56 (2020.01)
CPC G01K 17/06 (2013.01) [G01K 1/026 (2013.01); G01K 15/007 (2013.01); G01R 31/2601 (2013.01); G01R 31/2635 (2013.01); G01R 31/2642 (2013.01); G01R 31/2831 (2013.01); G01R 31/2837 (2013.01); G01R 31/2849 (2013.01); G01R 31/2875 (2013.01); G01R 31/56 (2020.01)] 18 Claims
OG exemplary drawing
 
1. A lifetime estimation system for estimating a lifetime of a heating source in an apparatus for heating a target object using the heating source and performing a feedback control of a temperature of the target object using a temperature controller based on a temperature measurement value of the target object that is measured by a temperature measuring device, the temperature controller controlling a power supplied to the heating source and performing a temperature control using a state space model to perform the feedback control of the temperature of the target object,
the lifetime estimation system comprising:
a processor; and
a memory storing instructions thereon, the instructions when executed by the processor cause the processor to:
monitor the temperature measurement value of the target object that is measured by the temperature measuring device;
detect a hunting amount in a stable region of the monitored temperature of the target object; and
estimate the lifetime of the heating source from the detected hunting amount.