CPC G01K 7/32 (2013.01) [B81B 3/0008 (2013.01); B81C 1/00944 (2013.01); B81B 2201/0278 (2013.01); B81B 2203/0136 (2013.01); B81B 2203/04 (2013.01); B81C 2201/013 (2013.01); B81C 2201/0105 (2013.01); B81C 2201/0116 (2013.01)] | 20 Claims |
1. A micro-electro-mechanical system (MEMS) device, comprising:
a first sensing electrode with a plurality of first electrode fingers;
a second sensing electrode with a plurality of second electrode fingers, wherein the pluralities of first and second electrode fingers are arranged in an interdigitated configuration and suspended over a substrate;
a curved sensing element coupled to adjacent first electrode fingers of the plurality of first electrode fingers, wherein the curved sensing element is configured to move the adjacent first electrodes and change a capacitance between the first and second sensing electrodes in response to a temperature sensed by the curved sensing element; and
a circuitry, coupled to the first and second sensing electrodes, configured to measure the temperature based on the capacitance between the first and second sensing electrodes.
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