US 11,796,319 B2
Sensor and electronic device
Fumito Miyazaki, Yokohama Kanagawa (JP); Yasushi Tomizawa, Tokyo (JP); Ryunosuke Gando, Yokohama Kanagawa (JP); Hiroki Hiraga, Saitama Saitama (JP); Kei Masunishi, Kawasaki Kanagawa (JP); Shiori Kaji, Kawasaki Kanagawa (JP); Daiki Ono, Yokohama Kanagawa (JP); and Etsuji Ogawa, Kawasaki Kanagawa (JP)
Assigned to Kabushiki Kaisha Toshiba, Tokyo (JP)
Filed by KABUSHIKI KAISHA TOSHIBA, Tokyo (JP)
Filed on Feb. 11, 2022, as Appl. No. 17/650,749.
Claims priority of application No. 2021-067538 (JP), filed on Apr. 13, 2021.
Prior Publication US 2022/0326013 A1, Oct. 13, 2022
Int. Cl. G01C 19/5712 (2012.01)
CPC G01C 19/5712 (2013.01) 20 Claims
OG exemplary drawing
 
1. A sensor, comprising:
a base body including a first surface including a first base body region and a second base body region;
a first structure body provided in the first base body region;
a second structure body provided in the second base body region; and
a control device,
the first structure body including a first movable member configured to vibrate, the vibration of the first movable member including a first component along a first direction along the first surface and a second component along a second direction along the first surface, the second direction crossing the first direction,
the second structure body including a second movable member configured to vibrate,
the control device including a controller configured to perform a processing operation, and
the processing operation including outputting a second rotation angle, the second rotation angle being obtained by correcting a first rotation angle based on a resonance frequency of the second movable member, the first rotation angle of the first movable member being obtained based on the first component and the second component.