CPC C09G 1/02 (2013.01) [H01L 21/3212 (2013.01); H01L 21/7684 (2013.01); H01L 21/76834 (2013.01); H01L 21/76843 (2013.01); H01L 21/76877 (2013.01)] | 20 Claims |
1. A polishing slurry comprising a nanocarbon particle having a nitrogen-containing functional group,
wherein a weight ratio of a nitrogen element relative to a carbon element of the hydrophilic nanocarbon particle expressed as N/C×100% is greater than or equal to about 5 wt %.
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