US 11,794,314 B2
Quick swap chuck with vacuum holding interchangeable top plate
Lim Chow Tian, Singapore (SG); Rajeev Patil, Fremont, CA (US); and Harit Maganlal Gadhia, Singapore (SG)
Assigned to KLA Corporation, Milpitas, CA (US)
Filed by KLA Corporation, Milpitas, CA (US)
Filed on Dec. 27, 2021, as Appl. No. 17/562,544.
Claims priority of provisional application 63/238,222, filed on Aug. 30, 2021.
Prior Publication US 2023/0069384 A1, Mar. 2, 2023
Int. Cl. H01L 21/683 (2006.01); B25B 11/00 (2006.01); G01N 21/95 (2006.01)
CPC B25B 11/005 (2013.01) [G01N 21/9501 (2013.01); H01L 21/6838 (2013.01)] 22 Claims
OG exemplary drawing
 
1. An apparatus for securing a substrate comprising:
a detachable plate, wherein the detachable plate is configured for reversible attachment to a base of a chuck, wherein the detachable plate includes one or more first vacuum reservoirs on a backside portion of the detachable plate and one or more second vacuum reservoirs on a frontside portion of the detachable plate,
wherein the base includes one or more base-substrate vacuum inlet channels and one or more base-plate inlet channels,
wherein the detachable plate is configured to establish fluidic connection between the one or more first vacuum reservoirs on the backside portion of the detachable plate and the one or more base-plate inlet channels for forming a first vacuum seal between the detachable plate and the base; and
wherein the detachable plate includes one or more pass-through channels for fluidic connection with the one or more base-substrate vacuum inlet channels to establish fluidic connection between the one or more second vacuum reservoirs on the frontside portion of the detachable plate for forming a second vacuum seal between the detachable plate and the substrate.