| CPC H10F 77/1437 (2025.01) [H10F 71/127 (2025.01); H10F 71/1395 (2025.01); H10F 77/124 (2025.01); H10F 77/311 (2025.01); Y02E 10/544 (2013.01)] | 12 Claims |
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1. A method of manufacturing a plurality of nanorod solar cells so that a substrate is able to be reused, the method comprising:
a first growth process of forming an etch stop layer on a substrate;
a second growth process of growing a sacrificial layer on the etch stop layer;
a third growth process of forming, on the sacrificial layer, a pattern layer comprising an opening at each location at which each nanorod solar cell is able to be grown;
a fourth growth process of growing the nanorod solar cells on the sacrificial layer through the openings within the pattern layer;
a forming process of forming a solar cell protection layer on outsides of the nanorod solar cells;
a first etching process of etching the sacrificial layer and the pattern layer; and
a second etching process of etching the etch stop layer.
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