US 12,453,189 B2
Solar cell fabrication
Di Yan, Bruce (AU); and Andres Cuevas, Griffith (AU)
Assigned to THE AUSTRALIAN NATIONAL UNIVERSITY, Acton (AU)
Appl. No. 16/467,105
Filed by THE AUSTRALIAN NATIONAL UNIVERSITY, Acton (AU)
PCT Filed Dec. 5, 2017, PCT No. PCT/AU2017/000260
§ 371(c)(1), (2) Date Jun. 6, 2019,
PCT Pub. No. WO2018/102852, PCT Pub. Date Jun. 14, 2018.
Claims priority of application No. 2016905022 (AU), filed on Dec. 6, 2016.
Prior Publication US 2023/0197876 A1, Jun. 22, 2023
Int. Cl. H10F 10/166 (2025.01); C23C 14/14 (2006.01); C23C 14/58 (2006.01); H01L 21/02 (2006.01)
CPC H10F 10/166 (2025.01) [C23C 14/14 (2013.01); C23C 14/5806 (2013.01); H01L 21/02381 (2013.01); H01L 21/02532 (2013.01)] 14 Claims
OG exemplary drawing
 
1. A process for fabricating a solar cell comprising:
depositing a layer of amorphous silicon on a substrate using physical vapour deposition;
annealing the amorphous silicon to generate a layer of polycrystalline silicon; and
after annealing, conducting another anneal at a temperature of between 300° C. and 600° C.,
wherein the substrate is a layer of a dielectric disposed on a silicon wafer, said layer of dielectric being less than 5 nm thick.