US 12,451,866 B2
Acoustic wave devices with multi-layer piezoelectric substrate
Rei Goto, Osaka (JP); and Hironori Fukuhara, Ibaraki (JP)
Assigned to Skyworks Solutions, Inc., Irvine, CA (US)
Filed by Skyworks Solutions, Inc., Irvine, CA (US)
Filed on Oct. 6, 2022, as Appl. No. 17/938,426.
Claims priority of provisional application 63/262,274, filed on Oct. 8, 2021.
Claims priority of provisional application 63/262,276, filed on Oct. 8, 2021.
Prior Publication US 2023/0113099 A1, Apr. 13, 2023
Int. Cl. H04B 1/00 (2006.01); H03H 9/02 (2006.01); H03H 9/145 (2006.01); H03H 9/25 (2006.01); H03H 9/56 (2006.01); H04B 1/40 (2015.01); H10N 30/067 (2023.01); H10N 30/50 (2023.01); H10N 30/853 (2023.01)
CPC H03H 9/25 (2013.01) [H03H 9/02559 (2013.01); H03H 9/02574 (2013.01); H03H 9/145 (2013.01); H03H 9/568 (2013.01); H04B 1/40 (2013.01); H10N 30/067 (2023.02); H10N 30/50 (2023.02); H10N 30/853 (2023.02)] 24 Claims
OG exemplary drawing
 
1. An acoustic wave device comprising:
a substrate,
a functional layer disposed over at least a portion of the substrate;
a piezoelectric layer disposed over at least a portion of the functional layer; and
an interdigital transducer electrode disposed on the piezoelectric layer, the piezoelectric layer has an outer edge spaced inward of an outer edge of the substrate, the outer edge of the piezoelectric layer tapered at an angle relative to a surface of the substrate to thereby reduce an acoustic reflection magnitude at said outer edge of the piezoelectric layer, and the functional layer having an outer lateral edge that is spaced inward of the outer edge of the substrate, tapered at the angle relative to the surface of the substrate, and aligned and coplanar with the outer edge of the piezoelectric layer.