US 12,451,860 B2
Structures, acoustic wave resonators, devices and systems
Dariusz Burak, Fort Collins, CO (US); Kevin J. Grannen, Thornton, CO (US); and Jack Lenell, Fort Collins, CO (US)
Assigned to QXONIX INC., Irvine, CA (US)
Filed by QXONIX, INC., Irvine, CA (US)
Filed on Dec. 29, 2021, as Appl. No. 17/564,824.
Application 17/564,824 is a continuation in part of application No. 17/380,011, filed on Jul. 20, 2021, granted, now 11,863,153.
Application 17/564,824 is a continuation in part of application No. PCT/US2020/043762, filed on Jul. 27, 2020.
Application 17/380,011 is a continuation of application No. 16/940,172, filed on Jul. 27, 2020, granted, now 11,101,783, issued on Aug. 24, 2021.
Claims priority of provisional application 62/881,074, filed on Jul. 31, 2019.
Claims priority of provisional application 62/881,091, filed on Jul. 31, 2019.
Claims priority of provisional application 62/881,087, filed on Jul. 31, 2019.
Claims priority of provisional application 62/881,085, filed on Jul. 31, 2019.
Claims priority of provisional application 62/881,061, filed on Jul. 31, 2019.
Claims priority of provisional application 62/881,094, filed on Jul. 31, 2019.
Claims priority of provisional application 62/881,077, filed on Jul. 31, 2019.
Prior Publication US 2022/0140806 A1, May 5, 2022
Int. Cl. H03H 9/13 (2006.01); H03H 9/02 (2006.01); H03H 9/205 (2006.01)
CPC H03H 9/02259 (2013.01) [H03H 9/02015 (2013.01); H03H 9/0207 (2013.01); H03H 9/02102 (2013.01); H03H 9/0211 (2013.01); H03H 9/02157 (2013.01); H03H 9/131 (2013.01); H03H 9/205 (2013.01); H03H 2009/02165 (2013.01)] 32 Claims
OG exemplary drawing
 
1. A bulk acoustic wave resonator comprising:
a substrate;
a first piezoelectric layer having a first piezoelectric axis orientation;
a second piezoelectric layer having a second piezoelectric axis orientation that substantially opposes the first piezoelectric axis orientation; and
a multi-layer metal top acoustic reflector electrode including a first pair of top metal electrode layers electrically and acoustically coupled with the first and second piezoelectric layers to excite a piezoelectrically excitable resonance mode at a main resonant frequency of the bulk acoustic wave resonator; and
an etched edge region extending through the first piezoelectric layer, the second piezoelectric layer, and the first pair of top metal electrode layers.