US 12,451,822 B2
Feeder member and wafer placement table
Taro Usami, Kasamatsu-Town (JP); Seiya Inoue, Handa (JP); Tatsuya Kuno, Nagoya (JP); and Tomoyuki Minami, Handa (JP)
Assigned to NGK INSULATORS, LTD., Nagoya (JP)
Filed by NGK INSULATORS, LTD., Nagoya (JP)
Filed on Nov. 20, 2023, as Appl. No. 18/513,850.
Application 18/513,850 is a continuation of application No. PCT/JP2023/016640, filed on Apr. 27, 2023.
Prior Publication US 2024/0364241 A1, Oct. 31, 2024
Int. Cl. H01T 23/00 (2006.01); H01R 4/02 (2006.01); H02N 13/00 (2006.01); H01L 21/683 (2006.01)
CPC H02N 13/00 (2013.01) [H01R 4/027 (2013.01); H01L 21/6833 (2013.01)] 6 Claims
OG exemplary drawing
 
1. A feeder member that is used to supply electricity to an electrode embedded in a ceramic base, the feeder member comprising:
an electrode-side terminal that is made of a high-melting-point metal containing material and that is joined to the electrode;
an intermediate member that is made of a Cu containing material and directly joined to the electrode-side terminal without using a brazing material;
a cable support member that is made of a Cu containing material and joined to the intermediate member; and
a cable that is made of a Cu containing material and that has one end whose end surface is welded to the cable support member.