US 12,451,387 B2
Substrate processing apparatus, teaching information generation method, teaching set, and substrate jig
Daiichi Kitagishi, Kyoto (JP); and Hiroshi Horiguchi, Kyoto (JP)
Assigned to SCREEN Holdings Co., Ltd., (JP)
Filed by SCREEN Holdings Co., Ltd., Kyoto (JP)
Filed on Mar. 21, 2022, as Appl. No. 17/699,802.
Claims priority of application No. 2021-049840 (JP), filed on Mar. 24, 2021.
Prior Publication US 2022/0310436 A1, Sep. 29, 2022
Int. Cl. H01L 21/683 (2006.01); H01L 21/67 (2006.01); H01L 21/677 (2006.01); H01L 21/68 (2006.01); H01L 21/687 (2006.01)
CPC H01L 21/6835 (2013.01) [H01L 21/67259 (2013.01); H01L 21/67766 (2013.01); H01L 21/67769 (2013.01); H01L 21/681 (2013.01); H01L 21/68707 (2013.01); H01L 21/68764 (2013.01)] 14 Claims
OG exemplary drawing
 
1. A substrate processing apparatus comprising:
a processing unit that performs predetermined processing on a substrate;
a transport robot that transports said substrate to said processing unit; and
a teaching unit that teaches a substrate transport position of said transport robot in said processing unit to said transport robot,
wherein said processing unit includes:
a substrate holder that holds said substrate in a horizontal positon; and
a substrate rotation mechanism that rotates said substrate holder about a rotation axis pointing in an up-down direction,
said transport robot includes a hand that transfers said substrate to and from said substrate holder,
when said hand located above said substrate holder holds a substrate jig having a lower surface provided with three optical sensors that are arranged nonlinearly, said substrate rotation mechanism rotates said substrate holder to form a circular rotation trajectory of a mark provided in advance on said substrate holder, and
said teaching unit calculates a position of said hand relative to said substrate holder in plan view in accordance with the position of said hand relative to said rotation trajectory obtained from each of said three optical sensors and generates horizontal teaching information that indicates an adequate relationship between relative positions of said hand and said substrate holder in plan view.