US 12,451,384 B2
Substrate storage container
Osamu Ogawa, Saitama (JP); and Seiya Nakarai, Saitama (JP)
Assigned to Shin-Etsu Polymer Co., Ltd., Tokyo (JP)
Filed by Shin-Etsu Polymer Co., Ltd., Tokyo (JP)
Filed on Oct. 5, 2023, as Appl. No. 18/377,053.
Application 18/377,053 is a continuation of application No. PCT/JP2022/000405, filed on Jan. 7, 2022.
Claims priority of application No. 2021-065011 (JP), filed on Apr. 6, 2021.
Prior Publication US 2024/0038561 A1, Feb. 1, 2024
Int. Cl. H01L 21/673 (2006.01)
CPC H01L 21/67383 (2013.01) 10 Claims
OG exemplary drawing
 
1. A substrate storage container, comprising:
a container body configured to store a substrate;
a lid that closes an opening of the container body;
a retainer that is attached to the lid; and
a pair of left and right arms formed in the retainer, each having a semi-cylindrical substrate support portion at a tip, wherein
each of the substrate support portions has a support surface that protrudes in an arc shape from the tip toward the container body in a cross-sectional view from a top-to-bottom direction perpendicular to a closing direction of the lid, and
each of the substrate support portions are configured to contact a side surface of the substrate to hold the substrate together with the container body to retain the substrate,
the arms each comprise a holding force adjustment portion formed in a shape that decreases in thickness from a proximal end to a distal end of the holding force adjustment portion.