US 12,451,376 B2
Wafer boat temporary storage device and semiconductor processing device
Jinlong Li, Beijing (CN); and Jianguo Li, Beijing (CN)
Assigned to BEIJING NAURA MICROELECTRONICS EQUIPMENT CO., LTD., Beijing (CN)
Appl. No. 18/715,376
Filed by BEIJING NAURA MICROELECTRONICS EQUIPMENT CO., LTD., Beijing (CN)
PCT Filed Nov. 24, 2022, PCT No. PCT/CN2022/133984
§ 371(c)(1), (2) Date May 31, 2024,
PCT Pub. No. WO2023/098555, PCT Pub. Date Jun. 8, 2023.
Claims priority of application No. 202111474714.2 (CN), filed on Dec. 3, 2021.
Prior Publication US 2025/0038015 A1, Jan. 30, 2025
Int. Cl. H01L 21/67 (2006.01); H01L 21/68 (2006.01); H01L 21/673 (2006.01)
CPC H01L 21/67109 (2013.01) [H01L 21/67017 (2013.01); H01L 21/68 (2013.01); H01L 21/673 (2013.01)] 15 Claims
OG exemplary drawing
 
1. A wafer boat temporary storage device for temporarily storing a wafer boat in a semiconductor processing device, comprising:
two carrying platforms arranged oppositely and configured to carry two ends of the wafer boat in a length direction of the wafer boat, respectively;
wherein:
the wafer boat includes two positioning parts arranged at two ends in the length direction and spaced apart in a width direction of the wafer boat;
each carrying platform includes a first positioning structure and a second positioning structure;
the first positioning structure is configured to make rolling contact with two sides of the two positioning parts at one end of the wafer boat that face toward or away from the two positioning parts at the other end of the wafer boat in the length direction to perform alignment between the wafer boat and the wafer boat temporary storage device in the length direction; and
the second positioning structure is configured to make rolling contact with two sides of the two positioning parts at one end of the wafer boat that face toward or away from each other in the length direction to perform alignment between the wafer boat and the wafer boat temporary storage device in the width direction;
wherein:
the wafer boat temporary storage device further includes a liquid cooling part, an air cooling part, and a filter part;
the liquid cooling part is used to cool ambient air;
the air cooling part is arranged closer to the carrying platforms than the liquid cooling part, and is used to blow the ambient air cooled by the liquid cooling part to the wafer boat carried on the carrying platforms;
the filter part is disposed between the liquid cooling part and the air cooling part to filter the ambient air blown by the air cooling part to the wafer boat carried on the carrying platforms;
the air cooling part includes a fan and a first support frame;
the fan is disposed above the first support frame for blowing the ambient air cooled by the liquid cooling part toward the wafer boat carried on the carrying platforms;
the first support frame includes an accommodation slot under the first support frame for accommodating the filter part;
the first support frame includes ventilation vents connected to the fan and the accommodation slot respectively; and
the accommodation slot is configured for retrieving the filter part.