US 12,451,370 B2
Substrate processing system with vertical arrangement structure
Dong Hwa Lee, Gyeonggi-do (KR); Hyung Chul Kim, Gyeonggi-do (KR); and You Sun Jung, Busan (KR)
Assigned to KCTECH Co., Ltd., Anseong-si (KR)
Appl. No. 18/012,685
Filed by KCTECH CO., LTD., Gyeonggi-do (KR)
PCT Filed May 28, 2021, PCT No. PCT/KR2021/006652
§ 371(c)(1), (2) Date Dec. 23, 2022,
PCT Pub. No. WO2022/005025, PCT Pub. Date Jan. 6, 2022.
Claims priority of application No. 10-2020-0080110 (KR), filed on Jun. 30, 2020.
Prior Publication US 2023/0260806 A1, Aug. 17, 2023
Int. Cl. H01L 21/67 (2006.01)
CPC H01L 21/67028 (2013.01) [H01L 21/67034 (2013.01); H01L 21/67178 (2013.01); H01L 21/67 (2013.01); H01L 21/6719 (2013.01); H01L 21/67253 (2013.01)] 9 Claims
OG exemplary drawing
 
1. A substrate processing system, comprising:
a cleaning device, positioned at a first position, for performing a cleaning process for a substrate;
a drying device, positioned at a second position, for performing a drying process for the substrate; and
a transfer unit for transferring the substrate from the cleaning device to the drying device,
wherein the first position and the second position are vertically arranged,
further comprising:
a weight measurement unit for primarily measuring the weight of the substrate at the first position after the cleaning process is completed and secondarily measuring the weight of the substrate at the second position after the substrate is transferred to the second position,
wherein the weight measurement unit is provided separately from the transfer unit and provided on a path between the first position and the second position,
the weight measurement unit comprises:
a first weight measuring device positioned at the first position; and
a second weight measuring device positioned at the second position,
the weight measurement unit further comprises:
a hinge driving unit for driving the first weight measuring device to be in a vertical direction from a horizontal direction.