US 12,451,339 B1
Ceramic susceptor having hybrid coating
Yun Ho Kim, Gimpo-si (KR); Joo Hwan Kim, Gimpo-si (KR); Hwan Young Park, Gimpo-si (KR); Bo Sung Kim, Gimpo-si (KR); and Hyun Taek Lee, Gimpo-si (KR)
Assigned to KSM COMPONENT CO., LTD., Gimpo-si (KR)
Filed by KSM COMPONENT CO., LTD., Gimpo-si (KR)
Filed on Aug. 16, 2024, as Appl. No. 18/806,817.
Claims priority of application No. 10-2024-0051251 (KR), filed on Apr. 17, 2024.
Int. Cl. C04B 35/117 (2006.01); C04B 41/00 (2006.01); C04B 41/50 (2006.01); C04B 41/87 (2006.01); H01J 37/32 (2006.01); H01L 21/48 (2006.01); H01L 21/687 (2006.01)
CPC H01J 37/32724 (2013.01) [C04B 35/117 (2013.01); C04B 41/009 (2013.01); C04B 41/5045 (2013.01); H01J 37/32495 (2013.01)] 11 Claims
OG exemplary drawing
 
1. A ceramic susceptor comprising a ceramic plate layer; and a coating layer located on the ceramic plate layer,
wherein the ceramic plate layer contains alumina (Al2O3); and aluminum nitride (AlN) and does not contain an aluminum oxynitride phase (AlON phase), and comprises a reaction layer formed at an interface between the ceramic plate layer and the coating layer,
wherein a content of the alumina is in excess of 68% by weight and less than 95% by weight based on a total weight of the ceramic plate layer,
a content of the aluminum nitride is more than 5% by weight and less than 32% by weight based on the total weight of the ceramic plate layer, and
wherein the ceramic susceptor has a volumetric resistance rate of 1.0E+10 to 1.0E+13 Ω·cm at 500° C. and a thermal conductivity of 30 to 60 W/m·k at room temperature.