US 12,451,333 B2
Plasma reaction device and cooling method thereof
Dai Kyu Choi, Seoul (KR); and Eun Seok Lim, Suwon-si (KR)
Assigned to NEW POWER PLASMA CO., LTD., Suwon-si (KR)
Appl. No. 18/010,531
Filed by NEW POWER PLASMA CO., LTD., Suwon-si (KR)
PCT Filed Jul. 29, 2020, PCT No. PCT/KR2020/010002
§ 371(c)(1), (2) Date Dec. 15, 2022,
PCT Pub. No. WO2021/256605, PCT Pub. Date Dec. 23, 2021.
Claims priority of application No. 10-2020-0073078 (KR), filed on Jun. 16, 2020.
Prior Publication US 2023/0260761 A1, Aug. 17, 2023
This patent is subject to a terminal disclaimer.
Int. Cl. H01J 37/32 (2006.01)
CPC H01J 37/32522 (2013.01) [H01J 37/32669 (2013.01)] 7 Claims
OG exemplary drawing
 
1. A plasma reaction device comprising:
a reactor body having a gas inlet at a side thereof, a plasma outlet at another side thereof, an annular loop space therein, and a body cooling channel therein;
a magnetic core provided in a shape surrounding at least a part of the reactor body, and having a primary coil to generate plasma by exciting a gas in the annular loop space;
a cooling block mounted outside the reactor body or the magnetic core, being in thermal contact with the reactor body or the magnetic core, and having a block cooling channel therein;
a connecting block having a first water inlet pipe and a first water outlet pipe at a side thereof to supply cooling water at a first temperature, and having a second water inlet pipe and a second water outlet pipe at another side thereof to collect the cooling water at a second temperature higher than the first temperature; and
a cooling water circulation line mounted between the connecting block, the cooling block, and the reactor body in such a manner that the cooling water provided through the connecting block passes through the block cooling channel of the cooling block, then passes through the body cooling channel of the reactor body, and is connected by the connecting block.
 
7. A cooling method of a plasma reaction device comprising a reactor body having a gas inlet at a side thereof, a plasma outlet at another side thereof, an annular loop space therein, and a body cooling channel therein, a magnetic core provided in a shape surrounding at least a part of the reactor body, and having a primary coil to generate plasma by exciting a gas in the annular loop space, a cooling block mounted outside the reactor body or the magnetic core, being in thermal contact with the reactor body or the magnetic core, and having a block cooling channel therein, a connecting block having a first water inlet pipe and a first water outlet pipe at a side thereof to supply cooling water at a first temperature, and having a second water inlet pipe and a second water outlet pipe at another side thereof to collect the cooling water at a second temperature higher than the first temperature, and a cooling water circulation line mounted between the connecting block, the cooling block, and the reactor body in such a manner that the cooling water provided through the connecting block passes through the block cooling channel of the cooling block, then passes through the body cooling channel of the reactor body, and is connected by the connecting block, the cooling method comprising:
primarily enabling heat exchange by allowing the cooling water to flow from an upper side to a lower side of the cooling block, then secondarily enabling heat exchange by allowing the cooling water to flow from a lower side to an upper side of the reactor body, and circulating the cooling water collected using the connecting block.