US 12,451,331 B2
Showerhead assembly with recursive gas channels
Reyn Tetsuro Wakabayashi, San Jose, CA (US); Carlaton Wong, Sunnyvale, CA (US); and Timothy Joseph Franklin, Campbell, CA (US)
Assigned to APPLIED MATERIALS, INC., Santa Clara, CA (US)
Filed by Applied Materials, Inc., Santa Clara, CA (US)
Filed on Sep. 22, 2020, as Appl. No. 17/028,587.
Prior Publication US 2022/0093361 A1, Mar. 24, 2022
Int. Cl. H01L 21/00 (2006.01); C23C 16/00 (2006.01); H01J 37/32 (2006.01)
CPC H01J 37/3244 (2013.01) [H01J 37/32532 (2013.01); H01J 2237/006 (2013.01)] 20 Claims
OG exemplary drawing
 
1. A showerhead assembly for use in a substrate processing chamber, comprising:
a chill plate comprising a gas plate disposed atop a cooling plate, the gas plate having a plurality of recursive gas paths integrally formed and disposed therein, the recursive gas paths being fluidly independent from each other and from one or more cooling channels disposed in the cooling plate, wherein each of the plurality of recursive gas paths is fluidly coupled to a single gas inlet in a first side of the gas plate and a plurality of gas outlets in a second side of the gas plate, wherein each of the plurality of recursive gas paths comprises an arcuate path extending from a respective one of the single gas inlet to a plurality of ends, each end coupled to a respective one of the plurality of gas outlets; and
a heater plate coupled to a bottom side of the chill plate, opposite the gas plate, wherein the heater plate includes one or more heating elements disposed therein, a plurality of first gas distribution holes extending from a top surface thereof to a plurality of plenums that are fluidly independent and disposed within the heater plate, the plurality of first gas distribution holes corresponding with the plurality of gas outlets of the gas plate, and a plurality of second gas distribution holes extending from the plurality of plenums to a lower surface of the heater plate.