US 12,450,715 B2
System for deriving electrical characteristics and non-transitory computer-readable medium
Heita Kimizuka, Tokyo (JP); and Natsuki Tsuno, Tokyo (JP)
Assigned to Hitachi High-Tech Corporation, Tokyo (JP)
Filed by Hitachi High-Tech Corporation, Tokyo (JP)
Filed on Aug. 22, 2023, as Appl. No. 18/453,405.
Application 18/453,405 is a continuation of application No. 16/885,727, filed on May 28, 2020, granted, now 11,776,103.
Claims priority of application No. 2019-136567 (JP), filed on Jul. 25, 2019.
Prior Publication US 2024/0020816 A1, Jan. 18, 2024
Int. Cl. G06T 7/00 (2017.01); H01J 37/22 (2006.01); H01J 37/28 (2006.01)
CPC G06T 7/0004 (2013.01) [H01J 37/222 (2013.01); H01J 37/28 (2013.01); G06T 2207/10061 (2013.01); G06T 2207/20081 (2013.01); G06T 2207/30148 (2013.01); H01J 2237/24578 (2013.01)] 12 Claims
OG exemplary drawing
 
1. A system comprising:
a charged particle beam apparatus that acquires an image of a sample; and
a computer system that includes one or more processors and is configured to be communicable with the charged particle beam apparatus;
wherein the computer system includes a memory that stores relation information related to information regarding two or more characteristics and reference information of a non-defective product or a defective product of a switching element formed on the sample, the characteristics being extracted from at least two pieces of image data acquired from the charged particle beam apparatus under at least two beam irradiation conditions,
wherein the one or more processors
receives information regarding two or more characteristics of a specific pattern included in a plurality of pieces of image data acquired from the charged particle beam apparatus under at least two different beam irradiation conditions, and creates a curve based on change in the information regarding two or more characteristics of the specific pattern included in the plurality of pieces of image data, the beam irradiation conditions including at least one of a blocking time and an irradiation time of a beam when the sample is irradiated with the beam in a pulsatile manner using the charged particle beam apparatus,
receives the relation information from the memory, and
evaluates input/output characteristics of the switching element or determines whether the switching element is a non-defective product or a defective product, by referring to a displacement point of the curve.