US 12,449,739 B2
Imprint apparatus and method of manufacturing article
Ryosuke Tsutsumi, Utsunomiya (JP)
Assigned to CANON KABUSHIKI KAISHA, Tokyo (JP)
Filed by CANON KABUSHIKI KAISHA, Tokyo (JP)
Filed on Oct. 26, 2022, as Appl. No. 17/973,771.
Application 17/973,771 is a continuation of application No. 16/794,548, filed on Feb. 19, 2020, granted, now 11,526,090.
Claims priority of application No. 2019-038762 (JP), filed on Mar. 4, 2019.
Prior Publication US 2023/0049521 A1, Feb. 16, 2023
This patent is subject to a terminal disclaimer.
Int. Cl. B29C 31/04 (2006.01); G03F 7/00 (2006.01); G03F 7/20 (2006.01); G03F 9/00 (2006.01); B29C 37/00 (2006.01)
CPC G03F 9/7042 (2013.01) [B29C 31/044 (2013.01); G03F 7/0002 (2013.01); G03F 7/20 (2013.01); G03F 9/7023 (2013.01); B29C 2037/90 (2013.01)] 15 Claims
OG exemplary drawing
 
1. An apparatus that contacts a member with a curable composition on a substrate, comprising:
a discharge unit on which a plurality of discharge outlets configured to discharge the curable composition as droplets are arranged;
a measurement unit configured to measure a relative tilt error between the discharge unit and the substrate, the relative tilt error causing a state where distances between the plurality of discharge outlets and a surface of the substrate are different from each other; and
a control unit configured to control a process of causing the discharge unit to discharge the curable composition from the plurality of discharge outlets onto the surface of the substrate while moving the substrate with respect to the discharge unit,
wherein the control unit is configured to determine a movement direction in which the substrate is moved with respect to an arrangement direction of the plurality of discharge outlets in the discharge unit in the process, in accordance with the relative tilt error measured by the measurement unit, in a state in which the relative tilt error has occurred.