US 12,449,738 B2
Rotary substrate support for aligning a substrate
Nagesha Jansale Venkatesha, Bengaluru (IN); and Yacov Elgar, Santa Clara, CA (US)
Assigned to APPLIED MATERIALS, INC., Santa Clara, CA (US)
Filed by Applied Materials, Inc., Santa Clara, CA (US)
Filed on Jun. 20, 2023, as Appl. No. 18/211,950.
Prior Publication US 2024/0427255 A1, Dec. 26, 2024
Int. Cl. G03F 7/00 (2006.01)
CPC G03F 7/70775 (2013.01) [G03F 7/707 (2013.01); G03F 7/70716 (2013.01); G03F 7/70758 (2013.01)] 20 Claims
OG exemplary drawing
 
1. A substrate support for aligning a substrate, comprising:
a base plate;
a rotary assembly including a stator coupled to the base plate and a rotor rotatably coupled to the stator via a bearing disposed therebetween;
a bellows assembly having a bellows fixed to the rotor, wherein the bellows is disposed radially inward of the stator and within a central opening of the stator; and
a lever having a first end coupled to the rotor and a second end configured to be coupled to an actuator; and
a chuck assembly configured to support the substrate, the chuck assembly disposed atop the base plate and fixedly coupled to the bellows assembly, wherein the chuck assembly is rotationally and axially movable along a central axis with respect to the base plate, and wherein rotation of the lever about the central axis rotates the bellows assembly and the chuck assembly with respect to the base plate to align the substrate with respect to the base plate when the substrate is disposed on the chuck assembly.