US 12,449,727 B2
Imprint apparatus, manufacturing method for article, and computer program
Hirotoshi Torii, Tochigi (JP)
Assigned to CANON KABUSHIKI KAISHA, Tokyo (JP)
Filed by CANON KABUSHIKI KAISHA, Tokyo (JP)
Filed on Jul. 29, 2022, as Appl. No. 17/877,283.
Claims priority of application No. 2021-137299 (JP), filed on Aug. 25, 2021.
Prior Publication US 2023/0066484 A1, Mar. 2, 2023
Int. Cl. G03F 7/00 (2006.01)
CPC G03F 7/0002 (2013.01) 16 Claims
OG exemplary drawing
 
1. An imprint apparatus configured to transfer a pattern from a mold onto resin by pressing the mold onto the resin on a surface of a substrate, the imprint apparatus comprising:
a magnification correction mechanism including a plurality of actuators that apply a force to a side of the mold via a corresponding plurality of contact members, to correct a shape of a patterned portion that has been formed on the mold;
a mold holding member that holds the mold;
a frame that is held by the mold holding member;
a concave member that is fixed to the frame and includes a membrane; and
a plurality of displacement members having the concave member that forms a chamber and displaceable by fluid pressure inside the chamber that change an initial position of the plurality of actuators for starting correction of the shape of the patterned portion via the plurality of contact members of the magnification correction mechanism according to a size of the mold,
wherein a thickness of the membrane is 2 mm or less.