US 12,449,489 B2
Three-axis Hall angle sensor with accuracy of 0.3°
Hua Fan, Chengdu (CN); Huichao Yue, Chengdu (CN); Yiming Hu, Chengdu (CN); Guo Li, Chengdu (CN); Jing Luo, Chengdu (CN); Panfeng Zhao, Chengdu (CN); and Quanyuan Feng, Chengdu (CN)
Assigned to UNIVERSITY OF ELECTRONIC SCIENCE AND TECHNOLOGY OF CHINA, Chengdu (CN)
Filed by University of Electronic Science and Technology of China, Chengdu (CN)
Filed on Dec. 3, 2023, as Appl. No. 18/527,347.
Claims priority of application No. 202310693285.0 (CN), filed on Jun. 12, 2023.
Prior Publication US 2024/0410961 A1, Dec. 12, 2024
Int. Cl. G01R 33/02 (2006.01); G01R 33/07 (2006.01)
CPC G01R 33/0206 (2013.01) [G01R 33/077 (2013.01)] 2 Claims
OG exemplary drawing
 
1. A three-axis Hall angle sensor, comprising: four horizontal Hall elements and eight vertical Hall elements disposed on a plane, wherein:
the eight vertical Hall elements are divided into two groups, an X-direction group and a Y-direction group, the X-direction group comprising four vertical Hall elements X1, X2, X3 and X4, and the Y-direction group comprising four vertical Hall elements Y1, Y2, Y3 and Y4; each vertical Hall element comprises four three-contact Hall components, and the four three-contact Hall components are connected end-to-end in series; the four horizontal Hall elements comprising Z1, Z2, Z3 and Z4 are in a 2×2 array arrangement; in the X-direction group, X1 and X2 are located on a left side of the four horizontal Hall elements; X2 is located between X1 and four horizontal Hall elements; X3 and X4 are located on a right side of the four horizontal Hall elements, and X3 is located between X4 and the four horizontal Hall elements;
X1 comprises the four three-contact Hall components, in which middle electrodes are AX1, BX1, CX1 and DX1 in sequence; X2 comprises the four three-contact Hall components, in which middle electrodes are AX2, BX2, CX2, and DX2 in sequence; X3 comprises the four three-contact Hall components, in which middle electrodes are AX3, BX3, CX3 and DX3 in sequence; X4 comprises the four three-contact Hall components, in which middle electrodes are AX4, BX4, CX4 and DX4 in sequence; when measuring an X-direction magnetic field, for a first vertical Hall element X1, applying a current bias between contact electrodes of BX1 and DX1, and measuring a Hall voltage VHallX1 between contact electrodes of AX1 and CX1; for a second vertical Hall element X2, applying a current bias between contact electrodes of BX2 and DX2, and simultaneously measuring a Hall voltage VHallX2 generated between AX2 and CX2; for a third vertical Hall element X3, applying a current bias between contact electrodes of CX3 and AX3, and measuring a Hall voltage VHallX3 between contact electrodes of BX3 and DX3; for a fourth vertical Hall element X4, applying a current bias between the AX4 and CX4 contact electrodes, and measuring a Hall voltage VHallX4 between contact electrodes of DX4 and BX4;
in a Y direction, vertical Hall elements Y1 and Y2 are located on an upper side of the four horizontal Hall elements, and Y2 is located between Y1 and the four horizontal Hall elements; vertical Hall elements Y3 and Y4 are located on a lower side of the four horizontal Hall elements, and Y3 is located between Y4 and the four horizontal Hall elements; Y1 comprises the four three-contact Hall components, in which middle electrodes are AY1, BY1, CY1 and DY1 in sequence; Y2 comprises the four three-contact Hall components, in which intermediate electrodes are AY2, BY2, CY2 and DY2 in sequence; Y3 comprise the four three-contact Hall components, in which intermediate electrodes are AY3, BY3, CY3 and DY3 in sequence; Y4 comprises the four three-contact Hall components, and intermediate electrodes are AY4, BY4, CY4 and DY4 in sequence;
when measuring a magnetic field in the Y direction, the following steps are taken: for a first vertical Hall element Y1, applying a current bias between DY1 and BY1, and measuring a Hall voltage VHallY1 between contact electrodes of AY1 and CY1; for a second vertical Hall element Y2, applying a current bias between BY2 and DY2, and simultaneously measuring a sensing Hall voltage VHallY2 generated between AY2 and CY2; for a third vertical Hall element Y3, applying a current bias between contact electrodes of AY3 and CY3, and measuring a Hall voltage VHallY3 between contact electrodes of DY3 and BY3; for a fourth vertical Hall element Y4, applying a current bias between the BY4 and DY4 contact electrodes, then measuring a Hall voltages VHallY4 between contact electrodes of CY4 and AY4;
each horizontal Hall element comprises four electrodes: A, B, C and D; a first horizontal Hall element Z1 is applied with a bias current between electrodes AZ1 and CZ1, and measuring a Hall voltage VHallZ1 generated between electrodes DZ1 and BZ1; for a second horizontal Hall element Z2, applying a current bias between electrodes BZ2 and DZ2, then measuring a Hall voltage VHallZ2 between electrodes AZ2 and CZ2; for a third horizontal Hall element Z3, applying a current bias between electrodes CZ3 and AZ3, then measuring a Hall voltage VHallZ3 between electrodes BZ3 and DZ3; for a fourth horizontal Hall element Z4, applying a current bias between electrodes DZ4 and BZ4, and measuring a Hall voltage VHallZ4 between electrodes CZ4 and AZ4; and the four identical Hall elements, Z1, Z2, Z3, Z4, are connected together by orthogonal coupling.