| CPC G01R 19/225 (2013.01) [F24D 11/0207 (2013.01); G01R 19/16519 (2013.01); G01R 19/257 (2013.01); H01L 21/67115 (2013.01); H05B 1/0233 (2013.01); Y02B 30/17 (2018.05)] | 19 Claims |

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1. A control system for controlling a heater, the control system comprising:
a power converter being a step-down voltage converter and including a power switch, wherein the power converter is operable to generate an adjustable output voltage;
a sensor circuit configured to measure at least one of a voltage or an electric current of the heater; and
a controller connected to the power converter and the sensor circuit, wherein the controller is configured to:
determine an input parameter based on the at least one of the voltage or the electric current, wherein the input parameter is indicative of a temperature of the heater,
determine an operational state of the heater based on the input parameter, wherein the heater is configured to operate in a plurality of operational states comprising a start-up mode, a soft-start mode in which the output voltage is gradually increased, a rate mode in which the output voltage is increased at a rate higher than that of the soft-start mode, and a hold mode,
set the output voltage applied for the heater based on the input parameter and a desired setpoint, wherein the desired setpoint is based on the operational state of the heater, and
operate the power switch of the power converter to generate the output voltage.
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