| CPC G01P 15/135 (2013.01) [G01P 1/023 (2013.01); G01P 15/0802 (2013.01); G01P 15/125 (2013.01); G01P 15/18 (2013.01); G01P 2015/0871 (2013.01)] | 9 Claims |
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1. An inertial sensor comprising:
a substrate;
a fixed electrode on the substrate;
a dummy electrode on the substrate, the dummy electrode being spaced apart from the fixed electrode in a plan view;
a movable body configured to be displaced with respect to the substrate, the movable body directly facing the first fixed electrode and the dummy electrode via a gap in the plan view, the movable body being electrically connected to the dummy electrode such that the movable body and the dummy electrode has a same potential; and
an attenuator configured to attenuate a displacement of the movable body with respect to the substrate, the attenuator being overlapped with only the dummy electrode in the plan view, wherein
the attenuator includes
a comb-shaped first structure including a plurality of movable comb fingers whose base ends are coupled to the movable body, and
a comb-shaped second structure including a plurality of fixed comb fingers whose base ends are coupled to the substrate, the plurality of fixed comb fingers intersecting with the plurality of movable comb fingers, and
a width of the base end of each of the movable comb fingers and the fixed comb fingers is larger than a width of a tip end thereof.
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