US 12,449,388 B2
MEMS gas sensor and array thereof, and gas detection and preparation method
Lei Xu, Anhui (CN); Dongcheng Xie, Anhui (CN); and Dongliang Chen, Anhui (CN)
Assigned to Wiinaa Co., Ltd., Anhui (CN)
Appl. No. 17/906,920
Filed by Wiinaa Co., Ltd., Anhui (CN)
PCT Filed Jul. 10, 2020, PCT No. PCT/CN2020/101406
§ 371(c)(1), (2) Date Sep. 21, 2022,
PCT Pub. No. WO2021/189718, PCT Pub. Date Sep. 30, 2021.
Claims priority of application No. 202010222341.9 (CN), filed on Mar. 26, 2020.
Prior Publication US 2023/0341367 A1, Oct. 26, 2023
Int. Cl. G01N 27/12 (2006.01); B81B 7/00 (2006.01); B81B 7/02 (2006.01); B81B 7/04 (2006.01); B81C 1/00 (2006.01); G01N 33/00 (2006.01)
CPC G01N 27/128 (2013.01) [B81B 7/0009 (2013.01); B81B 7/02 (2013.01); B81B 7/04 (2013.01); B81C 1/00642 (2013.01); G01N 27/125 (2013.01); G01N 33/0031 (2013.01); B81B 2201/02 (2013.01); B81B 2201/0292 (2013.01)] 17 Claims
OG exemplary drawing
 
1. A Micro-Electro-Mechanical System (MEMS) gas sensor, comprising: a first base substrate with a first surface on which a cavity is provided, and a gas detection component disposed at an opening of the cavity, wherein
the gas detection component comprises: a strip-shaped support suspension bridge erected at a first edge and a second edge of the opening of the cavity, wherein a strip-shaped support suspension bridge has a strip-shaped support bridge structure, and a gas detection part disposed on a side of the strip-shaped support suspension bridge away from the cavity, wherein the gas detection part comprises a strip-shaped heating electrode part, an insulation layer, a strip-shaped detection electrode part, and a gas sensitive material part, that are stacked sequentially, the strip-shaped detection electrode part comprises a first detection electrode part and a second detection electrode part, a first opening is provided between the first detection electrode part and the second detection electrode part, the gas sensitive material part is provided at a position of the first opening, a first end of the gas sensitive material part is connected with the first detection electrode part, and a second end of the gas sensitive material part is connected with the second detection electrode part;
wherein the MEMS gas sensor further comprises: a heating electrode pin, a first ground pin, a detection electrode pin, and a second ground pin, that are disposed on the first base substrate, wherein
the heating electrode pin is connected with a first end of the strip-shaped heating electrode part, and a second end of the strip-shaped heating electrode part is connected with the first ground pin;
a first end of the first detection electrode part is connected with the first end of the gas sensitive material part, and a second end of the first detection electrode part is connected with the detection electrode pin; and
a first end of the second detection electrode part is connected with the second end of the gas sensitive material part, and a second end of the second detection electrode part is connected with the second ground pin; wherein the cavity comprises more cavities, multiple gas detection components at a cavity opening of any one cavity share a pin, or multiple gas detection components at cavity openings of any multiple cavities share a pin;
wherein the multiple gas detection components sharing a pin, comprises: strip-shaped detection electrode parts of the multiple gas detection components share the detection electrode pin.