US 12,449,327 B2
Method and apparatus for lamp housing crack detection
Philip Mathew, Milpitas, CA (US); Mehran Behdjat, San Jose, CA (US); Masamori Sanaka, Yachiyo (JP); Koji Nakanishi, Tokyo (JP); Ryan Murdoch, Grenoble (FR); Mark David Johnson, Orem, UT (US); Jun Qian, Sherwood, OR (US); Yuchun Chang, Cupertino, CA (US); and George Govel, Schenectady, NY (US)
Assigned to APPLIED MATERIALS, INC., Santa Clara, CA (US)
Filed by Applied Materials, Inc., Santa Clara, CA (US)
Filed on Jul. 19, 2022, as Appl. No. 17/867,944.
Prior Publication US 2024/0027295 A1, Jan. 25, 2024
Int. Cl. G01M 3/02 (2006.01); H05B 3/00 (2006.01); F27B 17/00 (2006.01)
CPC G01M 3/02 (2013.01) [H05B 3/0047 (2013.01); F27B 17/0025 (2013.01)] 20 Claims
OG exemplary drawing
 
1. A method associated with a process chamber having a lamp housing, the method comprising:
sequentially processing a plurality of substrates in the process chamber;
during processing of the plurality of substrates, collecting lamp housing data indicative of a fluid leak in the lamp housing from a sensor, wherein the sensor is a pressure sensor configured to detect pressure along a surface of the lamp housing or a humidity sensor configured to detect relative humidity associated with the lamp housing, wherein the lamp housing includes a channel for flow of the fluid through the lamp housing;
determining from the lamp housing data, independent of a lamp module housed in the lamp housing, whether a lamp housing crack is present; and
responsive to determining the lamp housing crack is present, at least one of triggering an alert or stopping processing of the process chamber.