US 12,449,321 B2
Metal member with insulating film, physical quantity sensor, and pressure sensor
Masanori Kobayashi, Tokyo (JP); Ken Unno, Tokyo (JP); Tetsuya Sasahara, Tokyo (JP); and Kohei Nawaoka, Tokyo (JP)
Assigned to TDK CORPORATION, Tokyo (JP)
Filed by TDK CORPORATION, Tokyo (JP)
Filed on Feb. 10, 2023, as Appl. No. 18/167,586.
Claims priority of application No. 2022-028576 (JP), filed on Feb. 25, 2022.
Prior Publication US 2023/0273083 A1, Aug. 31, 2023
Int. Cl. G01L 7/08 (2006.01); G01L 19/00 (2006.01)
CPC G01L 7/082 (2013.01) [G01L 19/0084 (2013.01)] 8 Claims
OG exemplary drawing
 
1. A metal member with insulating film comprising:
a metal member including:
a film formation surface; and
a connection surface facing in a different direction from the film formation surface and connecting to the film formation surface;
an insulating film covering at least a part of the film formation surface and the connection surface over a connection position between the film formation surface and the connection surface; and
a reinforcement portion formed along a periphery of the insulating film at the connection position and covering at least a part of the periphery of the insulating film from an opposite side to the metal member.